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By A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader

ISBN-10: 0306438356

ISBN-13: 9780306438356

This quantity is devoted to the sector of dry (plasma) etching, as utilized in silicon semiconductor processing.

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In this case, the compromise in competition would also be generated. However, such a task requires vast computational power. The role of mesoscience is to simplify such problems using a generalized principle, which should allow them to be simulated accurately at reduced computational cost. That is, recognition of the governing principle in the formation of mesoscale phenomena will greatly simplify the analysis of them. This is the importance of mesoscience. We would expect that a generalized governing principle for mesoscales will be used to upgrade the traditional methods applied in different coarse-grained and statistical models in various fields.

1(b) and (a). This change corresponds to the independent movement of particles being suppressed by external forces such as magnetic force. 1(d) and (e). The results from these simulations indicate that the relative dominance between the two media plays an important role in shaping the dissipative behavior in such systems. The exclusive dominance of one over the other destroys such dissipative behavior. The ordered behavior in the system is therefore attributed to the compromise in competition between the two media.

Reasonable agreement was obtained between simulation and experimental data [49]. J. Li and W. 2 EMMS turbulence model [49] 35 36 4 Extension and Generalization of the EMMS Principle The universality of the principle of compromise in competition between dominant mechanisms was further confirmed by applying it to other systems [12]. Our results allowed us to preliminarily conclude that the compromise in competition between dominant mechanisms is the origin of complexity and diversity of all mesoscale phenomena and represents the mechanism of the stability condition of all complex systems.

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Dry Etching for VLSI by A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader


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